Methodology for ESCA Analysis of Electromigration

摘要

This preliminary investigation examines the feasibility of using ElectronSpectroscopy for Chemical Analysis (ESCA) to monitor electromigration in thin films. Because of the requirements of both the ESCA technique and the requisite in situ electromigration, the experimental methods are quite exacting. We report here designs and experimental methodology to permit the examination of electromigration with ESCA and suggest appropriate avenues for future research. Electromigration, Electron Spectroscopy for Chemical Analysis, ESCA.