Investigation of the Characteristics of Ferroelectric Thin Films Deposited byPulsed Laser Ablation

摘要

Ferroelectric thin films of barium strontium titanate (BSTO) have been depositedon bare and metallized substrates by the pulsed laser ablation method under different oxygen ambients (150 mT and 50 mT). Under an oxygen pressure of 150 mT, the film composition was similar to that of its ablation target composition, viz. Ba(0.6)Sr(0.4)TiO3. However, when the films were deposited under the lower oxygen pressure, x-ray diffraction studies showed the presence of a secondary phase. The electrical characteristics of the films were measured to examine the effect of the stoichiometry on the dielectric constant and tunability. jg.