Large-Numerical-Aperture Microlens Fabrication by One-Step Etching and Mass-Transport Smoothing

摘要

Precision f/1 microlenses have been fabricated in GaP by smoothing a multiple-mesa structure etched with a designed width and length variation. High-resolution lithography and ion-beam-assisted etching were used for mesa definition and resulted in accurate lens profiles after mass-transport smoothing at 900-1070 deg C. This much simplified fabrication technique is highly promising for efficient, diffraction-limited micro-optical elements. (jg).