Control of the Dissipation Dynamics of Nanomechanical Resonator in Viscous Media

摘要

This research aims to quantify and control the dissipation dynamics of NEMS device in fluid and eventually recover the quality factor of NEMS device in fluid. Our approach bases upon innovative modeling of micromechanical damping dynamics and exploitation of anti-damping in optomechanical resonators parametrically coupled with the surrounding fluid. During this 9-month period, we have successfully fabricated devices that can be operated in fluid with ultrahigh optical quality factor and recovered mechanical quality factor. Our next steps are to apply these devices in practical chemical and biological sensing applications.