Quantitative Mobility Spectrum Analysis for Magnetic Field Dependent Hall andResistivity Data

摘要

A method and apparatus for producing the conductivity mobility spectrum of anisotropic semiconductor material, and hence infer the nobility and concentration of carriers in the material. Hall voltage and material conductivity are measured at a plurality of magnetic field strengths, values of the spectrum estimated for each field strength, and the estimates numerically iterated to produce convergent values for the spectrum. In one embodiment, interim selected values of the spectrum are prevented from going negative, which increases the precision of the ultimate convergent values. In another embodiment, the iteration equations employ damping factors to prevent over correction from one iteration to the next, thus preventing convergent instabilities. The preferred iteration is the Gauss Seidel recursion.