Removing Sulfur from Gold Using Ultraviolet/Ozone Cleaning

摘要

Irradiating surfaces with ultraviolet (UV) light has been demonstrated to be aneffective means of eliminating surface contamination from a variety of substrates. The mechanism of this UV cleaning procedure involves UV excitation of surface species and conversion of molecular oxygen to ozone and atomic oxygen. These strong oxidizers then decompose UV excited organic surface contaminants to volatile groups such as CO, CO2, N2, etc. that can desorb, and inorganics are converted to highly oxidized states that can be readily removed by rinsing with ultrapure water.