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Magnetic Microscope for the Inspection of Multichip Modules

机译:用于检测多芯片模块的磁性显微镜

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We have established that it is feasible to design and construct a hightemperature superconductor (HTS) superconducting quantum interference device (SQUID) microscope for the inspection of multichip modules (MCM). An innovative HTS SQUID microscope which incorporates a room temperature scanning sample stage was designed, constructed, and is generating images from a variety of samples.

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