Statistical Modeling of SOI Devices for the Low Power Electronics Program. Phase1

摘要

The thrust of this program has been to perform research and development aimed attransforming the STADIUM technology into a user friendly tool for both military and commercial applications. The overall technical objective or the program has been to establish the feasibility of statistical semiconductor device simulation based on the methodology of design of experiments for the Low Power Electronics Program. In addition, we have investigated methodologies for developing statistical process device and circuit models for silicon on insulator technologies which can be used to optimize water tab processes and devices and to determine critical process operations for yield optimization. These capabilities will lead to reductions of manufacturing costs and time to market and an increase in product reliability.