Study of structural and transport properties of nanostructured CeO _2, Ce _(1-x)Ru _xO _2 and Ce _(1-x)In _xO _2 thin films

摘要

The present work reports for the first time thin films prepared from Ce _(1-x)M xO _(2-δ) (M=Ru, In) solid solutions for application as gas sensors. The CeO _2, Ce _(0.95)Ru _(0.05)O _2 and Ce _(0.95)In _(0.05)O _2 thin films were prepared by means of the RF sputtering process onto Si (111) substrates. The deposition conditions were carried out at 500°C varying the deposition time. Targets were prepared via sol-gel process starting from C _6H _9O _6In, Ru _3(CO) _(12) and Ce(C _2H _3O _2) _3·1.5H _2O compounds and using a ceramic method to consolidate them. The samples were characterized by means of XRD, SEM, and AFM. Their thickness was measured using a profilometer. The results herein obtained regarding the microstructure and transport properties indicate that these materials can be used as gas sensors.