On-site holographic interference method for fast surface topology measurements and reconstruction

摘要

Based on holographic interferometry technique, we develop a quantitative method for on-site characterization of surface topology and 3D reconstruction. The optical set-up with 2D spatial light modulator for surface characterization of 3D micro-structures is presented. It is shown that this non-destructive and non-contact method made possible the rapid investigation of 3D polymer structures employing diffractive masks and phase modulation based on two beams interference. The experimental results obtained with this method demonstrated the quantitative high-resolution measurement of samples topology with faster processing details comparing to the actual screening methods which cannot be used on-site conditions.