The road to industrializing PERC solar cells

摘要

The passivated emitter and rear contact (PERC) cell design is gaining acceptance in solar cell manufacturing because of its potential for high efficiency with p-type wafers and its easy integration into existing production lines. In terms of PERC mass production, an effective and reliable AlO_x deposition tool is the most important aspect that needs to be considered. Light-induced degradation (LID) is a cell efficiency bottleneck because of bulk recombination, even if the silicon surface is well passivated. This paper examines the combination of cell efficiency, AlO_x tool choice and LID regeneration as a route to industrializing PERC technology.