Plastic behaviour of an AlAs/GaAs superlattice with a short period

摘要

Nanoindentation has been used to investigate the plastic behavior of an AlAs/GaAs superlattice with a short period. The sample was grown on a (001) surface of a GaAs single crystal by metal-organic vapour-phase epitaxy. The mechanical response of the superlattice to nanoindentation testing was compared with that of a (001) surface of bulk GaAs. The indents formed were observed by transmission electron microscopy. The plastic zone size associated with each indent was measured as a function of the maximum load. Finally the arrangement of the dislocations generated by the indenter has been analysed and compared with the arrangement observed in deformed bulk GaAs.