Pulsed laser deposition of Pb(Zr_(0.52)Ti_(0.48))O_3 thin film on cobalt ferrite nano-seed layered Pt(111)/Si substrate: effect of oxygen pressure

摘要

The effect of oxygen pressure during pulsed laser deposition of Pb(Zr_(0.52)Ti_(0.48))O_3 (PZT) thin films on CoFe_2O_4 nano-seed layered Pt(111)/Si substrate was investigated. The PZT film deposited at oxygen pressure lower than 25 mTorr is identified as both perovskite and pyrochlore phases and the films deposited at high oxygen pressure (50-100 mTorr) show the single-phase perovskite PZT that has a perfect (111)-orientation. In addition, the film deposited at P_(O2) of 50 mTorr has a uniform surface morphology, whereas the film deposited at P_(O2) of 100 mTorr has a non-uniform surface morphology and more incompacted columnar cross-section microstructure. The polarization of film deposited at 100 mTorr is higher than that deposited at 50 mTorr, but shift of the hysteresis loop along the electrical field axis in the film deposited at P_(O2) of 100 mTorr is larger than that of the film deposited at P_(O2) of 50 mTorr.