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Peculiarities of the Structural Phase Transformations during Annealing of Doped Titanium-Nitride Coatings

机译:掺杂氮化钛涂层退火过程中结构相变的特殊性

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conjunction with microhardness measurements, a study has been performed of changes in the structural phase state and properties of titanium-nitride based coatings during annealings in vacuum to a temperature of 1573 K. It is shown that in coatings with submicron-size grains fragmented into nanosized subgrains, the magnitudes of local residual elastic stresses associated with elastoplastic curvature of the crystal lattice in regions of excess density of residual dislocations of one sign or with grain-boundary stress concentrators are of defining significance. It is established that in such coatings at high annealing temperatures (≥1373 K) grain coarsening and recovery of the intragrain defect structure develop non-uniformly while retaining high values of the density of the dislocations forming it and maintaining the low-angle boundaries at moderate lattice curvature. For annealings of nanocrystalline coatings, it is established that the intensity of precipitation of second-phase particles based on the doping elements has a defining influence on the hardness, characteristics of the structural state, and level of local stresses of titanium nitride nanocrystals.
机译:结合显微硬度测量,对在真空中退火至1573 K的温度下氮化钛基涂层的结构相态和性能进行了研究。研究表明,在亚微米级晶粒破碎成纳米级的涂层中在亚晶粒中,与残余晶格的弹塑性曲率相关的局部残余弹性应力的大小在具有一个符号的残余位错的过量密度的区域中或与晶界应力集中器具有重要的意义。已经确定,在这样的涂层中,在高退火温度(≥1373K)下,晶粒粗化和晶粒内缺陷结构的恢复不均匀,同时保持形成它的位错密度的高值并将低角度边界保持在中等水平。晶格曲率。对于纳米晶体涂层的退火,已经确定基于掺杂元素的第二相颗粒的沉淀强度对氮化钛纳米晶体的硬度,结构状态特征和局部应力水平具有决定性的影响。

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