Bulk plasma properties in the pulsed glow discharge

摘要

This work focuses on the spatial and temporal characteristics of a glow discharge plasma operated with power pulses of 5 ms in duration at 25% duty cycle. Interpretation of emission data provides insight into the nature of the plasma at each instant of a typical pulse cycle and at each position in space. Because the bulk plasma properties affect the distribution of excited energy levels of the sputtered atoms, an improved understanding of the plasma affords the ability to select conditions that enhance analytically important emission lines. Optical emission spectroscopy was used to determine the relative populations of excited states for atoms and ions during the initial breakdown, the steady state and the recombining periods of the discharge pulse cycle. The plasma is highly ionizing in nature at the time of breakdown-with lower excited states being overpopulated-before reaching the steady state, or plateau, period, also ionizing in nature. These behaviors arise from a loss of charged particvles and photons to the surroundings that shifts the plasma away from Saha and Boltzmann balances during these periods. The post-pulse period typically displays recombining behavior, characterized by population inversion for selected species-except for regions close to the cathode, where electrons and ions are lost by diffusion and are not available for recombination. The sputtered analyte atom emissions closely mimic those of the plama bath gas, except that their emissions persevere for longer in the recombining after-peak period than do the discharge gas species.