Preparation and properties of YSZ electrolyte thin films via liquid fuel combustion chemical vapor deposition

摘要

An innovative atmospheric combustion chemical vapor deposition (ACCYD) system for thin films has been developed. Thin films of yttria stabilized zirconia (YSZ) had been processed successfully on this system. The parameters such as the ratio of oxygen to liquid fuel in flame, the concentration of metal reagents in the solution, the temperature of the substrate, substrate material and heat-treatment played important roles in the film processing. They had been systematically investigated. The as-grown films were characterized with x-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS) and transmission electron microscopy (TEM). Within the range of experimental parameters, the phase of the film was predominately in fluorite cubic structure. It was shown that the phase and crystallinity of the films were strongly dependent upon the experimental variable.