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How can H content influence the tribological behaviour of W-containing DLC coatings

机译:H含量如何影响含W DLC涂层的摩擦学行为

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In this paper, the influence of the addition of W and H to pure DLC coatings on the structural, mechanical and tribological properties will be presented. The coatings were deposited by r.f. magnetron sputtering from a C target embedded with different numbers of W pellets. Working in non-reactive or reactive atmosphere allowed to deposit H-free or H-containing coatings, respectively, on steel and Si substrates. A Cr adhesion interlayer was interposed between the films and the substrate. Films with W content from 0 to 12 at percent and H incorporated up to a maximum value close to 40 at. percent were deposited. All coatings had an amorphous structure, although vestiges of crystallinity could be detected in W-containing films. The addition of W led to a significant hardening of the DLC coating (from ~ 10 to 18 GPa); inversely, with H incorporation the hardness drop down to values even lower than that of pure DLC films. It was possible to establish a good correlation between the hardness and the residual stresses. In spite of decreasing friction and wear coefficients when alloying DLC with W, almost no difference was found among the W-DLC films whatever the W content was. A similar trend was achieved with the H addition. However, in this case a decrease in the friction coefficient was registered whereas the wear rate increased. The best performance concerning the friction was obtained for an H-containing coating (0.05) whereas, for the wear resistance, H-free W-DLC films were better performing (0.3 X 10~(16) m~3 N~(-1) m~(-1)).
机译:在本文中,将介绍在纯DLC涂层中添加W和H对结构,机械和摩擦学性能的影响。涂层通过射频沉积。从嵌入不同数量W颗粒的C靶进行磁控溅射。在非反应性或反应性气氛中工作,可在钢和Si基板上分别沉积无H或含H的涂层。在膜和基板之间插入Cr粘附中间层。 W含量为0至12 at%,H含量最高为40 at的薄膜。百分之被存放。所有涂层均具有无定形结构,尽管可以在含W的薄膜中检测到结晶度痕迹。 W的添加导致DLC涂层的显着硬化(从〜10 GPa到18 GPa);相反,掺入H后,硬度下降到甚至低于纯DLC膜的硬度值。可以在硬度和残余应力之间建立良好的相关性。尽管将DLC与W合金化时摩擦系数和磨损系数降低了,但无论W含量如何,在W-DLC膜之间几乎没有发现差异。 H的添加也达到了类似的趋势。但是,在这种情况下,摩擦系数减小,而磨损率增加。对于含H的涂层,摩擦性能最佳(0.05),而对于耐磨性,无H的W-DLC膜的性能更好(0.3 X 10〜(16)m〜3 N〜(-1) )m〜(-1))。

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