SPUTTERED INDIUM-TIN OXIDE SUBSTRATES FOR CDS-CDTE SOLAR CELLS

摘要

Simple d.c. sputtering was used for the deposition of ITO films on glass substrates. Their structural, electrical, optical, and chemical properties depend on the substrate temperature. A temperature slightly above 400 degrees C is optimal and leads to an increase of the grain size, mobility, carrier concentration, and conductivity of the layers. The lowest resistivity is 1.88 x 10(-4) Omega cm and relevant transmittivity is 83.3%. Moreover, these layers are noted for a good chemical stability, which enables us to use them as transparent conductive electrodes for the CdS-CdTe solar cells prepared by chemical and electrochemical methods. ITO films on unheated substrates do not attain the required properties not even after annealings in various atmospheres. [References: 8]