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Identification of optimized Ti-Ni-Cu shape memory alloy compositions for high-frequency thin film microactuator applications

机译:确定用于高频薄膜微执行器的优化的Ti-Ni-Cu形状记忆合金成分

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摘要

Ti-Ni-Cu shape memory thin films within a broad composition range were investigated by the cantilever deflection method using combinatorial methods. Optimal compositions with improved functional properties, i.e.large recovery stress, high transformation temperatures, low thermal hysteresis width and small temperature interval of transformation, were identified using a newly defined figure of merit. Of the investigated alloys, Ti_(50)Ni _(41)Cu_9 and Ti_(45)Ni_(46)Cu_9 exhibit the best shape memory properties for compositions showing a B2 → B19 and a B2 → R-phase transformation, respectively.
机译:采用组合法,通过悬臂偏转法研究了较宽组成范围的Ti-Ni-Cu形状记忆薄膜。使用新定义的品质因数确定了具有改善的功能特性(即大的恢复应力,较高的转变温度,较低的热滞后宽度和较小的转变温度间隔)的最佳组合物。在研究的合金中,Ti_(50)Ni_(41)Cu_9和Ti_(45)Ni_(46)Cu_9分别对显示B2→B19和B2→R相转变的成分表现出最佳的形状记忆性能。

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