Microfabrication of PDMS microchannels using SU-8/PMMA moldings and their sealing to polystyrene substrates

摘要

In this paper we show increased interfacial bonding of a photoresist (SU-8) deposited onto highly polished poly( methyl methacrylate) ( PMMA) substrates containing a UV absorber. We also demonstrate the facile sealing/covalent bonding of 100 mu m x 20 mu m PDMS replica microchannels, made from these PMMA/SU-8 moldings, onto thermally polymerized styrene. Sealing was achieved through radio-frequency plasma discharge (RFPD) oxygen plasma treatment.