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首页> 外文期刊>SID International Symposium: Digest of Technology Papers >Direct Photolithographic Color Filter for 14.1-inch Flexible Color Electrophoretic Displays
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Direct Photolithographic Color Filter for 14.1-inch Flexible Color Electrophoretic Displays

机译:用于14.1英寸柔性彩色电泳显示器的直接光刻彩色滤光片

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摘要

A 14.1-inch flexible color electrophoretic display (EPD) has been fabricated successfully with the white reflectivity of 23.4%, contrast ratio of 8:1 and NTSC of 3.14%. The flexible color EPD device, in the main, involves a-Si thin-film transistors (TFTs) on a plastic substrate, microcup electrophoretic film and a quad-type color filter array pattern. To prevent the heat damage of EPD film and make the photolithography process possible, low temperature color resist have been developed, which requires only short pre-baking step of 80℃. This enables the possibility to produce a quad-type color filter array pattern directly on an EPD film. Here, we present a feasible and simple photolithography process to prepare color filter for color EPD application.
机译:已经成功制造了14.1英寸柔性彩色电泳显示器(EPD),其白色反射率为23.4%,对比度为8:1,NTSC为3.14%。柔性彩色EPD装置主要包括塑料基板上的a-Si薄膜晶体管(TFT),微杯电泳膜和四色滤色器阵列图案。为了防止EPD膜受到热损伤并使得光刻工艺成为可能,已开发出了低温彩色抗蚀剂,该抗蚀剂仅需短短的预烘烤步骤即可达到80℃。这使得有可能直接在EPD膜上产生四色滤色器阵列图案。在这里,我们提出一种可行且简单的光刻工艺来制备用于彩色EPD应用的滤色器。

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