Analysis of the effect of material anisotropic properties on the eigenfrequency of ring cavities of micromechanical gyroscopes

Zotov SA

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Analysis of the effect of material anisotropic properties on the eigenfrequency of ring cavities of micromechanical gyroscopes

机译：材料各向异性特性对微机械陀螺仪环形腔本征频率的影响分析

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摘要

The design of the ring resonator of the MEMS gyroscope is described and a mathematical model of its dynamics is presented. The effect of anisotropic properties of a structural material on eigenfrequencies of the ring resonator of the MEMS gyroscope and device errors is studied.

机译：描述了MEMS陀螺仪的环形谐振器的设计，并给出了其动力学的数学模型。研究了结构材料的各向异性特性对MEMS陀螺仪环形谐振器的本征频率和器件误差的影响。

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《Semiconductors 》 |2008年第13期| 共4页
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Zotov SA;
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正文语种 eng
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机译：材料各向异性特性对微机械陀螺仪环形腔本征频率的影响分析
2. Micromechanical analysis of effective piezoelastic properties of smart composite sandwich shells made of generally orthotropic materials [J] . Saha GC, Kalamkarov AL, Georgiades AV Smart Materials & Structures . 2007 ,第3期

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3. Method for prediction the distribution of material properties during injection molding (III) -warpage analysis considering the material property distribution in a thick cavity [J] . Masahiro Seto, Yuuji Terakura, Mikio Sasaki, 成形加工: プラスチツク成形加工学会志 . 2003 ,第2期

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4. Research of Influence of Materials Properties on Resonance Frequencies of Micromechanical Tuning Fork Gyroscope [C] . Lobur, Mykhaylo, Holovatyy, . 2007

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5. Finite element analysis of anisotropic viscoelastic composite structures and analytical determination of optimum viscoelastic material properties. [D] . Yi, Sung. 1992

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6. Effect of Specimen-Specific Anisotropic Material Properties inQuantitative Computed Tomography-Based Finite Element Analysis of theVertebra [O] . Ginu U. Unnikrishnan, Glenn D. Barest, David B. Berry, -1

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7. Micromechanical analysis of coupling between anisotropic damage and friction in quasi brittle materials: Role of the homogenization scheme [O] . Zhu, Q.-Z., Kondo, D., Shao, J. F. 2008

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8. Design, Construction, and Analysis of an Ultra-Low Expansion Quartz Resonant Cavity Passive Ring Resonator Laser Gyroscope [R] . Pugh, K. A. 1982

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Analysis of the effect of material anisotropic properties on the eigenfrequency of ring cavities of micromechanical gyroscopes

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