Flexible biomedical microdevices with double-sided electrode arrangements for neural applications

摘要

Micromachined devices with substrate-integrated electrodes are the key components in implantable microsystems for recording of neural signals or electrical stimulation of nerves. So far, electrodes have been located on only one side of the microsystems. In this paper, a technology has been developed to fabricate multichannel microelectrodes that are located on the top side and the back side of a flexible device. The process technology for polyimide-based devices is described. Prototypes of implantable microdevices with double-sided electrodes, called flexible nerve plates. have been fabricated. Results are discussed on scanning electron microscopy, cross-sections, and first electrochemical characterizations of the electrodes.