The use of sputtered ZnO piezoelectric thin films as broad-band microactuators

摘要

An actuation system is described which utilizes a single active ZnO piezoelectric thin film deposited onto a silicon cantilever. The method for obtaining films for effective actuation by r.f. magnetron sputtering is discussed. The actuator has been incorporated into a system which enables unwanted vibrations of the cantilever to be cancelled, whilst maintaining the ability simultaneously to deflect the cantilever as required.# 1997 Elsevier Science S.A.