A 9.45 MHz micromechanical disk resonator with movable electrodes for gap reduction

摘要

A micro-electromechanical wine glass modal disk resonator with movable electrodes is presented in this paper. The movable electrodes were driven by electrostatic force for gap reduction to reduce insertion loss. By reducing the gap from 2.5 mu m to 0.5 mu m, the insertion loss improved from -104 dB to -81 dB at the same bias voltage of 20 V. However, unstable movable electrodes caused the quality factor to decrease from 920,000 to 27,200. (C) 2016 Published by Elsevier B.V.