Love wave ultraviolet photodetector using ZnO nanorods synthesized on 90°-rotated ST-cut (42°45′) quartz

摘要

This study enhances the ultraviolet sensitivity of Love wave photodetector using a novel application of ZnO nanorods. The Love wave photodetector was fabricated using a ZnO guiding layer with nanorod arrays deposited on a 90°-rotated ST-cut (42°45′) quartz substrate. Dense crystalline ZnO thin films were deposited by radio frequency magnetron sputtering. The ZnO nanorod arrays were synthesized on a ZnO thin film via the hydrothermal method. The crystalline structure, surface morphology and luminescent characteristics of films and nanorod arrays were examined by X-ray diffraction, scanning electron microscopy, and photoluminescence spectrometer. This study investigated the effects of the interaction of the Love wave with the ultraviolet light in the ZnO guiding layer on shift of insertion loss, phase shift of transmitted signal, and capacitance change of an interdigital transducer. The ultraviolet sensitivity of the Love wave photodetector was enhanced by adding nanorod arrays to the guiding layer.