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首页> 外文期刊>Sensors and Actuators, A. Physical >Thermal management of fully LTCC-packaged Cs vapour cell for MEMS atomic clock
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Thermal management of fully LTCC-packaged Cs vapour cell for MEMS atomic clock

机译:完全LTCC封装的Cs蒸气电池用于MEMS原子钟的热管理

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摘要

This paper describes a study of the thermal behaviour of fully packaged Caesium vapour cell developed in the framework of the European collaborative research project called "MEMS atomic clocks for timing, frequency control and communications (MAC-TFC)". This cell, along with various electronic and optical components, is embedded in a Low Temperature Co-fired Ceramics (LTCC) structure, in order to build a compact MEMS-based atomic clock. Functioning of such atomic clock depends on inner and outer environment of the Cs vapour cell, including parameters such as pressure and temperature of buffer gas. This paper is then devoted to study the thermal behaviour of a fully LTCC-packaged Cs vapour cell according to the ambient temperature change when it is locally temperature controlled. Simulations have been carried out by using analytical modelling and finite element based softwares. Different solutions concerning the LTCC structure such as bridges/suspensions, vacuum environment, metallic coating, as well as the optimal positions of the temperature-control elements have been investigated. Finally, preliminary experiments based on a prototype resulting from this study are presented and an additional solution based on the dynamic adjustment of the set temperature as a function of the ambient temperature is proposed.
机译:本文描述了在名为“用于定时,频率控制和通信(MAC-TFC)的MEMS原子钟”的欧洲合作研究项目框架下开发的完全封装铯蒸气电池的热行为的研究。该电池与各种电子和光学组件一起嵌入低温共烧陶瓷(LTCC)结构中,以构建基于MEMS的紧凑型原子钟。这种原子钟的功能取决于Cs蒸气电池的内部和外部环境,包括诸如缓冲气体的压力和温度之类的参数。然后,本文致力于根据局部温度控制时环境温度的变化,研究完全LTCC封装的Cs蒸气电池的热行为。通过使用分析模型和基于有限元的软件进行了仿真。研究了有关LTCC结构的不同解决方案,例如桥/悬架,真空环境,金属涂层以及温度控制元件的最佳位置。最后,提出了基于本研究的原型的初步实验,并提出了基于设定温度随环境温度的动态调节的其他解决方案。

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