Sputtering Layered TiO_2/SnO_2 Films for Ozone Gas Sensing Property

摘要

Various TiO_2 and SnO_2-based sensing materials were prepared by sputtering method. TiO_2, SnO_2, TiO_2-SnO_2, SnO_2/TiO_2 and TiO_2/SnO_2 were used to detect ozone concentration by the photoreductive method. These prepared sensing materials were characterized using scanning electron microscopy (SEM) and X-ray diffraction (XRD). A sputtered layered TiO_2/SnO_2 device had a high sensor response of 560 to 2.5 ppm ozone, a short recovery time of 40 s and a sensor head that operated at room temperature. The ozone sensing characteristics were explained with reference to the mechanisms of adsorption, photoreduction and desorption of ozone on the surface.