Research and fabrication of integrated optical chip of Mach–Zehnder microinterference accelerometer

摘要

A novel hybrid-integrated optical accelerometer, based on Mach–Zehnder interference, is described. The integrated Mach–Zehnder microinterferometer chip is investigated theoretically and experimentally. On the LiNbO_3 substrate with the dimensions of 38 mm×6 mm×2 mm, MMI optical power splitter, Y-branching guide, phase modulator and polarizers are integrated to constitute the Mach–Zehnder microinterference chip. The performance of a prototype of the accelerometer is characterised. The measured frequency spectrum is in good agreement with the theoretical prediction.