We report the first entanglement generation experiments using silicon waveguide. Using highly efficient spontaneous four-wave mixing in a 1.09 cm long silicon nanowire waveguide at room temperature, we successfully generated high-purity time-bin and polarization entangled photon pairs in the 1.5 (mu)m band. We expect this entanglement source will solve the problems of previous telecom-band entanglement sources.
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