The structures of films obtained from a coordination compound, copper dipivaloylmethanate, and by vacuum vapor deposition onto single crystal silicon substrates are studied. The size of crystals constituting films and intercrystal distances are microscopically estimated with the help of optical and scanning electron microscopes. The refractive index distribution along the film thickness and the optical anisotropy of films are determined by monochromatic zero ellipsometry. The optical anisotropy of films is shown to correlate with the surface morphology.
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