首页> 外文期刊>Optik: Zeitschrift fur Licht- und Elektronenoptik: = Journal for Light-and Electronoptic >Comparative analysis for measurement precision of phase retrieval wavefront sensor
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Comparative analysis for measurement precision of phase retrieval wavefront sensor

机译:相位恢复波前传感器测量精度的对比分析

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摘要

In order to analyze the performance of phase retrieval wavefront sensor (PRWS), an experimental based on the PRWS method has been built. In this paper, we utilize liquid crystal space light modulator (LC-SLM) to produce single aberration and random aberration, and validate the ability of PRWS measurement for any aberrations. Mathematic model of phase retrieval measurement is constructed based on the diffraction theory, and solved using gradient based optimization algorithm. Experimental results demonstrate that good agreement is obtained among the errors distribution, PV value and RMS value of ZYGO interferometer. The measurement precision of wavefront is 3/1000 wavelength RMS. Therefore, the feasibility and accuracy of the proposed method can be confirmed.
机译:为了分析相位恢复波前传感器(PRWS)的性能,建立了基于PRWS方法的实验。在本文中,我们利用液晶空间光调制器(LC-SLM)来产生单像差和随机像差,并验证PRWS测量任何像差的能力。基于衍射理论构造了相位恢复测量的数学模型,并使用基于梯度的优化算法进行求解。实验结果表明,ZYGO干涉仪的误差分布,PV值和RMS值之间具有良好的一致性。波前的测量精度为3/1000波长RMS。因此,可以证实该方法的可行性和准确性。

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