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Simple heterodyne laser interferometer with subnanometer periodic errors

机译:具有亚纳米周期误差的简单外差激光干涉仪

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摘要

We describe a simple heterodyne laser interferometer that has subnanometer periodic errors and is applicable to industrial fields. Two spatially separated beams can reduce the periodic errors, and the use of a right-angle prism makes the optical configuration much simpler than previous interferometers. Moreover, the optical resolution can be enhanced by a factor of 2, because the phase change direction is opposite between reference and measurement signals. Experiments have demonstrated the periodic errors are less than 0.15 nm owing to the frequency mixing of the optical source. The improvements for reducing the frequency mixing of the optical system are also discussed.
机译:我们描述了一种简单的外差激光干涉仪,该干涉仪具有亚纳米级的周期性误差,适用于工业领域。两个在空间上分开的光束可以减少周期性误差,并且直角棱镜的使用使光学配置比以前的干涉仪简单得多。此外,由于参考信号和测量信号之间的相变方向相反,因此可以将光学分辨率提高2倍。实验表明,由于光源的频率混合,周期性误差小于0.15 nm。还讨论了减少光学系统混频的改进措施。

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