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A novel long trace profiler for synchrotron radiation optics

机译:一种用于同步加速器辐射光学的新型长轨迹轮廓仪

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Increasing demands for accuracy in manufacturing and utilizing optics in synchrotron radiation facility require more precise surface measuring techniques. A novel profilometer design for testing aspherical optical elements, especially the optics used in synchrotron radiation, is presented, in which a phase plate is introduced so as to generate a pattern on the detector that can be easily and accurately centered. Compared with conventional long trace profilers, the optical system of this novel design is simple, therefore its potential error sources are greatly reduced. The feasibility of the method is validated in theory and experiments with a newly developed prototype. Experimental results show that this prototype works well even under an opening operation environment without temperature control and air conditioning. (c) 2004 Elsevier Ltd. All rights reserved.
机译:对在同步加速器辐射设备中制造和使用光学器件的精度要求越来越高,这就需要更精确的表面测量技术。提出了一种新颖的轮廓仪设计,用于测试非球面光学元件,尤其是用于同步加速器辐射的光学元件,其中引入了相位板,以便在检测器上生成可以轻松且准确地定中心的图案。与传统的长轨迹轮廓仪相比,这种新颖设计的光学系统非常简单,因此大大减少了潜在的误差源。该方法的可行性已在理论和实验上通过新开发的原型得到了验证。实验结果表明,该原型即使在没有温度控制和空调的开放操作环境下也能很好地工作。 (c)2004 Elsevier Ltd.保留所有权利。

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