VARIABLE REFLECTIVITY MIRRORS WITH ALL PROFILED LAYERS

摘要

The paper describes die design and realization of variable reflectivity mirrors (VRM). A deposition model which considers the mask aperture as an extended source with a cos(x)(theta) angular distribution was used in order to obtain the radial thickness profile. For a certain multilayer system, deposited with a fixed mask, a map relating the reflectance profile parameters to die deposition geometry was calculated. The experimental results are also presented. [References: 10]