Nanofaceting of LiNbO3 X-cut surface by high temperature annealing and titanium diffusion

摘要

The topmost surface of crystal during Ti-indiffused LiNbO3 waveguide preparation was studied using atomic force microscopy and high energy electron diffraction. The formation of the flat terraces with high step similar to0.24 nm as a result of high temperature annealing has been detected. The global changing of surface morphology induced by Ti diffusing was observed. No new phase formation on the surface was detected. (C) 2003 Published by Elsevier Science B.V. [References: 7]