Methods of Improving the Accuracy of Operation of an Autofocus in a Circular Laser Writing System

摘要

Specific features of operation of an autofocus in a CLWS-300IAE circular laser writing system are considered. The influence of the focus error on the process of direct laser writing of diffraction structures is considered. A digital adaptive controller for the system of autofocus control is described and studied in experiments. Algorithms of controller operation, a technique for its tuning, and experimental results are described.