Polycrystalline LiNbO_3 thin films characterized by infrared and Raman spectroscopy

M Zezulová; M Jelínek; T Kocourek; V Vorlí?ek; V ?elezny

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Polycrystalline LiNbO_3 thin films characterized by infrared and Raman spectroscopy

机译：红外和拉曼光谱表征的多晶LiNbO_3薄膜

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Thin films of lithium niobate (LiNbO_3) were studied by Fourier transform infrared and microRaman spectroscopy. The films were prepared on SiO_2/Si substrate at substrate temperatures of 650, 700 and 750 oC from monocrystalline or sintered LiNbO_3 targets, using KrF excimer laser ablation. The films were polycrystalline. The changes of film properties and E and A_1 phonon spectra with deposition conditions were studied, and were compared with bulk data.

机译：用傅立叶变换红外和显微拉曼光谱研究了铌酸锂（LiNbO_3）薄膜。使用KrF受激准分子激光烧蚀，在单晶或烧结LiNbO_3靶上，在衬底温度650、700和750 oC的SiO_2 / Si衬底上制备薄膜。膜是多晶的。研究了薄膜性能，E和A_1声子谱随沉积条件的变化，并与大量数据进行了比较。

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来源
《Laser Physics: An International Journal devoted to Theoretical and Experimental Laser Research and Application》 |2014年第2期|共4页
作者
M Zezulová; M Jelínek; T Kocourek; V Vorlí?ek; V ?elezny;
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正文语种 eng
中图分类激光技术、微波激射技术;
关键词
LiNbO_3; thin films; FTIR spectroscopy; Raman spectroscopy; phonons;

机译：LiNbO_3;薄膜;FTIR光谱;拉曼光谱;声子;

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1. Polycrystalline LiNbO_3 thin films characterized by infrared and Raman spectroscopy [J] . M Zezulová, M Jelínek, T Kocourek, Laser Physics: An International Journal devoted to Theoretical and Experimental Laser Research and Application . 2014,第2期

机译：红外和拉曼光谱表征的多晶LiNbO_3薄膜
2. Identification of LiNbO_3, LiNb_3O_8 and Li_3NbO_4 phases in thin films synthesized with different deposition techniques by means of XRD and Raman spectroscopy [J] . Bartasyte A., Plausinaitiene V., Abrutis A., Journal of Physics. Condensed Matter . 2013,第20期

机译：利用X射线衍射和拉曼光谱鉴定用不同沉积技术合成的薄膜中LiNbO_3，LiNb_3O_8和Li_3NbO_4相。
3. Characterization of Defects in Polycrystalline Silicon Thin Films Using Chemical Etching, Hydrogenation, and Raman Spectroscopy [J] . Kuninori KlTAHARA, Hiroya OGASAWARA, Junji KAMBARA, Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers . 2008,第1Issue1期

机译：使用化学蚀刻，氢化和拉曼光谱表征多晶硅薄膜中的缺陷
4. Study of Thin Films of LiNbO_3 Using FTIR and Raman Spectroscopy [C] . Marketa Zezulova, Miroslav Jelinek, Vladimir Zelezny, Photonics, devices, and systems V . 2011

机译：FTIR和拉曼光谱研究LiNbO_3薄膜
5. Investigation of thin film thermal transport using micro-Raman thermometry and tip enhanced Raman spectroscopy. [D] . Srinivasan, Mithun. 2016

机译：使用微拉曼测温和尖端增强拉曼光谱研究薄膜热传输。
6. Profilometry of thin films on rough substrates by Raman spectroscopy [O] . Martin Ledinský, Bertrand Paviet-Salomon, Aliaksei Vetushka, -1

机译：拉曼光谱法测定粗糙基材上的薄膜的轮廓
7. RAMAN SPECTROSCOPY CHARACTERIZATION OF POLYCRYSTALLINE GaP THIN FILMS GROWN BY MO-CVD PROCESS USING [Et2Ga - PEt2]3 AS ONLY SOURCE [O] . Maury, F., Combes, M., Constant, G., 1982

机译：仅以[Et2Ga-PEt2] 3为源，通过MO-CVD工艺生长的多晶间隙薄膜的拉曼光谱表征

Polycrystalline LiNbO_3 thin films characterized by infrared and Raman spectroscopy

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