Modeling of step-like object images in scanning differential heterodyne microscope using rigorous diffraction theory

摘要

A theory of the image formation for a scanning differential heterodyne microscope is presented using the rigor-ous diffraction theory for perfectly conducting-arbitrary-surfaced object. Computed results are compared with experimental responses to step-like object with the 0.35 μm height and the 0.3 μm transition. The superresolving object characterization is analyzed using a variation of step parameters. An enhancement of microscope sensitivity using an adjustment of the interval between probing spots and choosing the polarization state of probing beams is investigated. The responses obtained with the rigorous method and those obtained by means of the scalar diffraction theory are compared.