Integrated chemical microsensor systems in CMOS technology

摘要

The objective in using microfabrication techniques and CMOS technology for chemical sensors is,in a generic approach,to devise more intelligent,more autonomous,more integrated,and more reliable gas sensor systems at low cost.Since the sensor market is strongly fragmented,i.e.,there exists a large variety of applications with different needs and sensor requirements,a modular approach or "toolbox strategy" relying on CMOS as platform technology has been identified as a very promising approach to the overall objective.