Properties of dc magnetron sputtered indium tin oxide films on polymeric substrates at room temperature

摘要

Indium tin oxide (ITO) thin films were deposited on polymeric substrates at room temperature by dc reactive magnetron sputtering from an In-Sn (90-10 wt) alloy target. The electrical, optical, and mechanical properties of ITO films on various substrates such as polycarbonate, acrylic, polyethylene terephthalate, and glass are influenced sensitively by sputtering parameters. Therefore, the dependence of these properties on dc power, working pressure, and partial oxygen content has been systematically investigated. Low dc power was applied to avoid the deformation of polymeric substrates. The electrical resistivity of as-deposited ITO films decreases initially and then increases as oxygen partial pressure (PO2) increases. The optical transmittance at visible wavelength of 550 nm was as much as 85. The friction force of as-deposited ITO films on various substrates is increased with an increase of dc power, and behaves similarly to the optimum curve of resistivity with increasing PO2. (C) 2001 American Institute of Physics. References: 18