Development of Metal-Free Conductive Bonded Diamond Wheel for Environmentally-Friendly Electrolytic In-Process Dressing (ELID) Grinding

摘要

In this study, we developed the prototype of a metal-free conductive bonded diamond wheel for environmentally-friendly ELID grinding using carbon capable of producing high-quality ground surfaces similar to mirror surfaces with excellent grinding efficiency while preventing environment pollution caused by waste fluids containing metal ions, as well as preventing contamination of device wafers by metal, and investigated the basic grinding characteristics of this wheel. The experimental results were as follows; 1) the optimal mixing ratio of carbon to resin for the wheel developed is 20% and excellent conductivity and strength can be obtained, 2) the wheel developed using this optimal mixing ratio is found to generate a surface coating made of oxides during electrolytic dressing, 3) the grinding efficiency of the wheel is higher when electrolytic dressing is added compared to when it is not added, 4) excellent ground surface roughness can be achieved with the wheel although the grinding performance is lower than that of the cast-iron bonded diamond wheel generally used for ELID grinding. It was also clarified that the ground surfaces were free of contamination by metal.