Effect of oxygen partial pressure on texture development in lead zirconate titanate thin films processed from metalorganic precursors

摘要

Metalorganic liquid precursors were used toexamine the effects of processing atmosphere on texturedevelopment in oriented Pb(Zr_0.60Ti_0.40)O_3 thin films. Afterremoval of organic ligands via pyrolysis, the films were heated at25 beg C/min in a 5percent H_2/Ar atmosphere until a switchingtemperature, after which the atmosphere was switched to pureoxygen. The films were heated to a maximum temperature of 650beg C with switching temperatures ranging from 450 to 600 beg C.The degree of (111) orientation in the lead zirconate titanate (PZT)films increased with increasing switching temperature, resulting inhighly textured (111) PZT films. These results suggest thatatmosphere control plays a significant role in texture developmentduring rapid thermal processing.