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SHADOW TECHNIQUE IMPROVES MEASUREMENT OF MICRO HOLES

机译:阴影技术可改善微孔的测量

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Sometimes seeing a shadow can be as good or better than seeing the real thing. A new measurement method* developed by researchers working at the NIST is a case in point. The method uses the shadow cast by a small glass probe to infer the dimensions of tiny, microscale holes or other micrometer-sized components. The technique may provide an improved quality control method for measuring the interior dimensions of fuel nozzles, fiber optic connectors, biomedical stents, ink jet cartridges and other precision-engineered products. Designed to be implemented with the type of coordinate measuring machine (CMM) routinely used in precision manufacturing settings, the method uses a flexible glass fiber with a microsphere attached on one end. The glass probe is attached to the CMM's positioning system, inserted into the part to be measured, and systematically touched to the part's interior walls in multiple locations. A light-emitting diode is used to illuminate the glass fiber. While the microsphere inside the part is not visible, the shadow of the attached fiber-with a bright band of light at its center-shows the amount of deflection in the probe each time the part's interior is touched. A camera records the shadow positions. Based on prior calibration of the force required to bend the probe a specific distance, the part's dimensions can be determined with an uncertainty of about 35 nanometers (nm). The method can be used for holes as small as 100 micrometers in diameter.
机译:有时,看到阴影可能比看到真实事物好或更好。 NIST研究人员开发的一种新的测量方法*就是一个很好的例子。该方法使用由小型玻璃探针投射的阴影来推断微小的微型孔或其他微米级组件的尺寸。该技术可以提供一种改进的质量控制方法,用于测量燃料喷嘴,光纤连接器,生物医学支架,喷墨墨盒和其他精密工程产品的内部尺寸。该方法旨在通过在精密制造环境中通常使用的坐标测量机(CMM)的类型来实现,该方法使用一端连接微球的柔性玻璃纤维。玻璃探针连接到CMM的定位系统,插入到要测量的零件中,并在多个位置系统地接触到零件的内壁。发光二极管用于照亮玻璃纤维。虽然看不见部件内部的微球,但每次触摸部件内部时,连接的光纤的阴影(在中心处都有明亮的光带)显示了探针中的偏转量。照相机记录阴影位置。根据弯曲探针特定距离所需的力的先前校准,可以确定零件的尺寸,不确定性约为35纳米(nm)。该方法可用于直径小至100微米的孔。

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