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Logic circuits based on individual semiconducting and metallic carbon-nanotube devices

机译:基于单个半导体和金属碳纳米管器件的逻辑电路

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摘要

Nanoscale transistors employing an individual semiconducting carbon nanotube as the channel hold great potential for logic circuits with large integration densities that can be manufactured on glass or plastic substrates. Carbon nanotubes are usually produced as a mixture of semiconducting and metallic nanotubes. Since only semiconducting nanotubes yield transistors, the metallic nanotubes are typically not utilized. However, integrated circuits often require not only transistors, but also resistive load devices. Here we show that many of the metallic carbon nanotubes that are deposited on the substrate along with the semiconducting nanotubes can be conveniently utilized as load resistors with favorable characteristics for the design of integrated circuits. We also demonstrate the fabrication of arrays of transistors and resistors, each based on an individual semiconducting or metallic carbon nanotube, and their integration on glass substrates into logic circuits with switching frequencies of up to 500 kHz using a custom-designed metal interconnect layer.
机译:采用单独的半导体碳纳米管作为沟道的纳米级晶体管,对于可以在玻璃或塑料基板上制造的具有大集成密度的逻辑电路具有巨大的潜力。碳纳米管通常以半导体和金属纳米管的混合物形式生产。由于仅半导体纳米管产生晶体管,因此通常不使用金属纳米管。然而,集成电路通常不仅需要晶体管,而且还需要电阻负载装置。在这里,我们表明,与半导体纳米管一起沉积在基板上的许多金属碳纳米管可以方便地用作负载电阻,具有用于集成电路设计的良好特性。我们还演示了分别基于单个半导体或金属碳纳米管的晶体管和电阻器阵列的制造,以及使用定制设计的金属互连层将它们集成在玻璃基板上的逻辑电路,其开关频率高达500 kHz。

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