High-speed atomic force microscopy for large scan sizes using small cantilevers

摘要

We present a high-speed atomic force microscope that exhibits a number of practical advantages over previous designs. Its central component is a high-speed scanner with a maximum scan size of 23 νm × 23νm and a conveniently large sample stage area (6.5mm × 6.5mm). In combination with small cantilevers, image rates of up to 46 imagess~(- 1) in air and 13 imagess~(- 1) in liquid are reached under z-feedback control. By large scan size imaging of collagen fibrils in air, sample velocities of 8.8 mms ~(- 1) in the xy-direction and 11mms~(- 1) in the z-direction are reached. To provide optimized imaging conditions for both large and small scan sizes, a modular scanner design allows easily exchanging the x-and y-piezos. The scanner is therefore also suited for investigations on the molecular and atomic scale, which is demonstrated by imaging the step dynamics of a calcite surface during dissolution and the hexagonal lattice of a mica surface in liquid.