High-precision positioning table units for extreme special environments

摘要

Koyo Machine Industries has developed a high-precision positioning table unit and an actuator unit that can be used in semiconductor and liquid crystal manufacturing equipment, vacuums, devices for use in space, and other special-environment applications. And it continues to develop higher-precision unit products that can be used in vacuums, clean rooms, high-temperature, corrosive and other special environment in response to demand from customers.