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Synthesis of imide UV monomers for application to interdielectric layer of TFT-LCD array

机译:酰亚胺UV单体的合成及其在TFT-LCD阵列介电层中的应用

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Novel negative-type photocurable imide UV monomers were synthesized and characterized for an application to interdielectric layer in TFT-LCD array. Two different imide-type UV monomers were synthesized through 2 step reaction. In addition, alkali developable polymer matrix was also prepared by free radical random copolymerization of benzylmethacrylate and methacrylic acid in THF at 65 degrees C. It was found from photolithographic process that via-hole with good resolution were obtained using optimum formulations, suitable for spin coating process, of negative-type imide UV monomers, photoinitiator, UV oligomer, and alkali developable polymer matrix.
机译:合成了新型负型光固化酰亚胺紫外单体,并表征了其在TFT-LCD阵列介电层中的应用。通过两步反应合成了两种不同的酰亚胺型UV单体。此外,还通过甲基丙烯酸苄酯和甲基丙烯酸在THF中于65摄氏度的自由基无规共聚制备了可碱显影的聚合物基体。从光刻工艺中发现,使用适合旋涂的最佳配方可获得具有良好分辨率的通孔负型酰亚胺UV单体,光引发剂,UV低聚物和碱可显影的聚合物基质。

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