Integrated optics devices based on liquid crystals

摘要

We describe the technology behind a platform for integrated optics based on liquid crystals. Design and technological issues are addressed and effective technological solutions are presented. The physical implementation of optical waveguides characterized by a practical and reproducible process based on preferential etching of crystalline silicon substrates are presented. Devices are manufactured by wet etching a Si substrates first and then by thermally growing thick SiO2 cladding layer. A nematic liquid crystal is used as core of the waveguiding devices. Experimental results on polarizing properties and single mode propagation of infrared light are presented and discussed.