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Characterization of networked poly(urethane-(methacrylate-co-styrene)) prepared with NCO-terminated prepolymer for negative photoresist

机译:用NCO封端的预聚物制备的用于负性光致抗蚀剂的网状聚(氨基甲酸酯-(甲基丙烯酸酯-共苯乙烯))的表征

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摘要

The synthesis and characterization of the photoresist polymer for using as spacer in LCD panel were investigated. The poly(methacrylate-co-styrene) (PMHS) and NCO-terminated prepolymer were synthesized using radical initiator and catalyst, respectively, and in-situ, the poly(urethane-(methacrylate-co-styrene)) (PMHSU) was prepared with the PMHS and NCO-terminated prepolymer. The PMHS and the PMHSU were characterized by FT-IR, H-1-NMR and thermal properties were investigated by thermogravimetric analysis (TGA) and differential scanning calorimetry (DSC). After the films were prepared by the sequential processes of spin-coating propylene glycol monoethyl ether acetate solution containing PMHSU, multifunctional monomer, and photoinitiator, pre-baking, UV-exposing and post-baking, the compression recovery of the films was investigated by nano-indenter. The negative patterns of the PMHSU were obtained by developing.
机译:研究了液晶面板中用作隔离层的光致抗蚀剂聚合物的合成与表征。分别使用自由基引发剂和催化剂合成聚(甲基丙烯酸酯-共苯乙烯)(PMHS)和NCO封端的预聚物,并就地制备聚氨基甲酸酯-(甲基丙烯酸酯-共苯乙烯)(PMHSU)与PMHS和NCO封端的预聚物。通过FT-IR,H-1-NMR对PMHS和PMHSU进行表征,并通过热重分析(TGA)和差示扫描量热法(DSC)研究热性能。通过旋涂包含PMHSU,多功能单体和光引发剂的丙二醇单乙醚乙酸酯溶液,预烘烤,紫外线曝光和后烘烤的顺序过程制备薄膜,然后通过纳米方法研究薄膜的压缩回复率。 -压头。通过显影获得了PMHSU的负图。

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